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PPT-ALD Thin Film Materials LDRD review 2009 PowerPoint Presentation

NuFact09 ALD of IIIV semiconductors and other structurematerials What have been done GaN AlN AlGaN InN Not too hard for InGaN TiO 2 ZnO Other Pt nanoparticles

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ALD Thin Film Materials LDRD review 2009: Transcript

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