PPT-ALD Thin Film Materials LDRD review 2009
Author : luanne-stotts | Published Date : 2018-09-22
NuFact09 ALD of IIIV semiconductors and other structurematerials What have been done GaN AlN AlGaN InN Not too hard for InGaN TiO 2 ZnO Other Pt nanoparticles
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ALD Thin Film Materials LDRD review 2009: Transcript
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