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Search Results for 'Layerisperformedinclass100cleanroomafterstandardrcacleaning.asubsequentfurnace Ambientiscarriedouttoformcovalentbondsatthesige/sio Interface.theannealingtemperatureandtimeareoptimizedtoachieveahighbon'

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target substrate SiO SiH o CVD is used to form SiO layers that are much thicker in relativel y very short times than thermal oxides

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