PPT-FIB system Oxford EBSD system

EDS system Sample Loading STEM detector Stage Rotation 360 o Tilt 70 o BS detector V kV depth um A Density gcm3 Z 1 000818 10642 119 46 2 00260 5 0120 10 0382

electrons detector electron beam detector electrons beam electron sample surface energy lens secondary atoms system fib bse scattered number

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