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JOURNALOFMICROELECTROMECHANICALSYSTEMS,VOL.15,NO.1,FEBRUARY2006AnUntet

JOURNALOFMICROELECTROMECHANICALSYSTEMS,VOL.15,NO.1,FEBRUARY2006AnUntet

tatiana-dople
15 Slides

by250 by10 Thedeviceconsistsofacurved,cantilevered...

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