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Micromechanicalresonators published presentations and documents on DocSlides.

336JOURNALOFMICROELECTROMECHANICALSYSTEMS,VOL.9,NO.3,SEPTEMBER2000Exte

336JOURNALOFMICROELECTROMECHANICALSYSTEMS,VOL.9,NO.3,SEPTEMBER2000Exte

  • pasty-toler
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m-squarepolysiliconchipsagainstareferencefixtureel...

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