PPT-Process flow part 2 Develop a basic-level process flow for creating a simple MEMS device

State and explain the principles involved in attaining good mask alignment Identify and explain the various issues involved with designing good process flows Typical process steps for surface . What are the main characteristics of Lemoptix MEMS mirrors What is the difference between Mechanical and Opti By Dave Brennan. Advisors: Dr. Shannon . Timpe. , Dr. Prasad . Shastry. Introduction . Part 1) Quick MEMS introduction. Part 2) Capacitive Sensing. Part 3) Goal. MEMS background. Microelectrical mechanical systems (USA), Microsystems Technology (Europe), Micromachines, Japan…etc. By Dave Brennan. Advisors: Dr. Shannon . Timpe. , Dr. Prasad . Shastry. Introduction . Part 1) Quick MEMS introduction. Part 2) Capacitive Sensing. Part 3) Goal. MEMS background. Microelectrical mechanical systems (USA), Microsystems Technology (Europe), Micromachines, Japan…etc. www.controltrix.com. Accelerometers (acc) measure acceleration. Gyroscopes (gyro) measure angular velocity. Integrated MEMS may have 3 axis gyro + 3 axis acc. MEMS have low cost compared to other types of gyro /acc . Tim Stucchi . Sensera. Operations Manager. 2. MEMS?. . M. icro-. E. lectro-. M. echanical-. S. ystems. A technique of fabricating Electrical and Mechanical elements on a. chip with miniature dimensions. by. Tim Stucchi . Sensera. Operations Manager. 2. MEMS?. . M. icro-. E. lectro-. M. echanical-. S. ystems. A technique of fabricating Electrical and Mechanical elements on a. chip with miniature dimensions. LabView . and . Arduino (. DUE . 1400470). Ivy . Tech, Northeast – Engineering, Andrew Bell. Abstract . (. simplified) . – Describe three new MEMS courses that build on SCME MEMS material using LabView and Arduino. Each of the courses will be taught and developed this summer over a 12 week period. This poster will describe the overall course content, teaching methodology and use of technology to teach MEMS. Three teaching styles will be used: (CA) classical approach (lecture, lab and quizzes) with use of multimedia material, (DB) discovery based with focus on labs and hands-on learning, and (IBL) incremental with blended lecture and discovery based learning. Our goal is to determine whether these courses can be taught online. . 22 April 2015. Abstract. . Microelectromechanical Systems (MEMS) are devices that integrate mechanical systems with electronic circuits. Fabrication of MEMS involves the use of specialized micromachining technologies. Device packaging aims to protect from outside damage and varies drastically depending upon application. Different materials used, fabrication techniques, and packaging types will be examined.. MEMs Sensors. Hand-held Devices. Automotive Industry. Aerospace Industry. Medical Applications. Types Of Sensors. Inertial Sensors. Gyroscopes. Accelerometers. Compass Sensor. Pressure Sensor. Microphone. Micro/Nano Electromechanical Systems. Liaison Report. February . 2017. About SEMI Standards. Established in 1973. Experts from the microelectronic, display, photovoltaic, and related industries. Exchange ideas and develop globally-accepted technical standards. Brought to you by: Jack Link & Aaron Schiller. Date delivered on: Friday the third of May, 2013. ABSTRACT:. Taking a brief look at MicroElectroMechanical Systems (MEMS), we will guide you through the fabrication stages and show you some applications that they are used for. MEMS can be very simple and not move at all to being immensely complex systems with lots of moving elements being controlled by the system. Starting off with some simple facts we will then show the stages of their fabrication. The basic process of manufacturing MEMS starts with deposition of thin films onto their respective material layers. Then the material is patterned by one of many forms of lithography. The final step in creating MEMS is etching the pattern so that the final product will be the desired shape. MEMS can be created at a relatively low cost because they can be produced in high volumes because of bulk fabrication. MEMS are used for microvalves for controlling gas and liquid, switches, sensors, actuators, and much more!. 22 April 2015. Abstract. . Microelectromechanical Systems (MEMS) are devices that integrate mechanical systems with electronic circuits. Fabrication of MEMS involves the use of specialized micromachining technologies. Device packaging aims to protect from outside damage and varies drastically depending upon application. Different materials used, fabrication techniques, and packaging types will be examined.. 2 min Madness. L. Bouchra. . 1. , C. . Szopa. . 1. , A. . Buch. . 2. , P. . Cardinael. . 3. , V. . Pelon-Agasse. . 3. , D. . Coscia. . 1. , . J.-P. . Pineau. . 1. , V. . Guerini. . 1. , . T. . What Students Will Do:. Discuss requirements with clinical collaborator. – Design solution. – Fabricate solution. – Test solution in simple model. – Redesign until satisfactory. Deliverables:.