PPT-Image Reversal Liftoff Process – Heidelberg Exposure PowerPoint Presentation

Metal thickness 3000A Cr UF NRF BLewis 2013 1 Process Flow bake 125C 15 min HMDS std process S1813 Suss spin IHD F1813123 or F181320 bake cee HP 2 min 112C

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Published on 2018-10-29

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