PDF-SchematicsandmechanismoftheSAWgyroscopewithametallicdotarraybyKurosawa
Figure1
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Figure2
Experimentalresultsofthegyroscopewithrespecttoangularratesa
Measuredresponseofthegyroscopeand
b
measured
responseofBEIgyroscope
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etalMicroandNanoSystemsLetters
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