Electron-beam lithography

with the Raith EBPG Part 1 Introduction M Rooks Yale University The EBPG has a long history stretching back to the 1960s This particular ebeam system was first built by Philips in the Netherlands then was bought out by Cambridge Instruments UK which morphed into Leica Lithography spun off as

Embed this Presentation

Download Notice

Download Presentation The PPT/PDF document "Electron-beam lithography" is the property of its rightful owner. Permission is granted to download and print the materials on this website for personal, non-commercial use only, and to display it on your personal computer provided you do not modify the materials and that you retain all copyright notices contained in the materials. By downloading content from our website, you accept the terms of this agreement.