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PPT-The CMOS Process P. Bruschi – Microelectronic System Design PowerPoint Presentation

1 Planar CMOS process is used up to the 28 nm technology node For later technology nodes 3D CMOS MOSFETs FinFETs are used Planar CMOS processes are still extensively

microelectronic bruschi cmos system bruschi microelectronic system cmos active polysilicon gate poly substrate layer wells triple lateral doped areas

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The CMOS Process P. Bruschi – Microelectronic System Design: Transcript

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