PDF-TB KR JMM NSTITUTE OF HYSICS UBLISHING OURNAL OF ICRO

Author : alida-meadow | Published Date : 2015-06-15

Micromech Microeng 15 2005 18 doi10108809601317150000 Design and fabrication of MEMS devices using the integration of MUMPs trenchre64257lled molding DRIE and bulk

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