PDF-Characterization of platinum lift-off technique H.D.Tong, R.A.F.Zwijze

Author : alida-meadow | Published Date : 2016-06-21

Abstract In micro electromechanical systems MEMS and micro electronic devices there has cleaning procedures and pretreatment of wafers in an oxygen rich environment

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Characterization of platinum lift-off technique H.D.Tong, R.A.F.Zwijze: Transcript

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